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Hydrogen diffusion coefficient of silicon nitride thin films
Hydrogen diffusion coefficient of silicon nitride thin films
Hydrogen diffusion coefficient of silicon nitride thin films
Yu, G. C. (author) / Yen, S. K. (author)
APPLIED SURFACE SCIENCE ; 201 ; 204-207
2002-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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