Hydrogen diffusion coefficient of silicon nitride thin films

Yu, G. C. / Yen, S. K. | British Library Online Contents | 2002

Preparation of silicon carbide nitride thin films by sputtering of silicon nitride target

Peng, X. / Song, L. / Meng, J. et al. | British Library Online Contents | 2001

Diffusion and effusion analysis of hydrogen in undoped hydrogenated amorphous silicon thin films

Lopez, F. / Andujar, J. L. / Morenza, J. L. et al. | British Library Online Contents | 1993

Diffusion and effusion analysis of hydrogen in undoped hydrogenated amorphous silicon thin films

Lopez, F. / Andujar, J. L. / Morenza, J. L. et al. | British Library Online Contents | 1993

Chemical Composition of Silicon Nitride Thin Films Prepared by LPCVD

Ge, Q.-m. / Liu, X.-j. / Huang, Z.-y. et al. | British Library Online Contents | 2006