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    Synthesis and characterization of low pressure chemically vapor deposited titanium nitride films using TiCl4 and NH3

    New search for: Ramanuja, N.
    New search for: Levy, R. A.
    New search for: Dharmadhikari, S. N.
    New search for: Ramos, E.
    New search for: Pearce, C. W.
    New search for: Menasian, S. C.
    New search for: Schamberger, P. C.
    New search for: Collins, C. C.

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    Synthesis and characterization of low pressure chemically vapor deposited titanium nitride films using TiCl4 and NH3

    New search for: Ramanuja, N.
    New search for: Levy, R. A.
    New search for: Dharmadhikari, S. N.
    New search for: Ramos, E.
    New search for: Pearce, C. W.
    New search for: Menasian, S. C.
    New search for: Schamberger, P. C.
    New search for: Collins, C. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Synthesis and characterization of low pressure chemically vapor deposited titanium nitride films using TiCl4 and NH3

    New search for: Ramanuja, N.
    New search for: Levy, R. A.
    New search for: Dharmadhikari, S. N.
    New search for: Ramos, E.
    New search for: Pearce, C. W.
    New search for: Menasian, S. C.
    New search for: Schamberger, P. C.
    New search for: Collins, C. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Synthesis and characterization of low pressure chemically vapor deposited titanium nitride films using TiCl4 and NH3

    Contributors:

    Ramanuja, N. (author) / Levy, R. A. (author) / Dharmadhikari, S. N. (author) / Ramos, E. (author) / Pearce, C. W. (author) / Menasian, S. C. (author) / Schamberger, P. C. (author) / Collins, C. C. (author)

    Published in:

    MATERIALS LETTERS ; 57 ; 261-269

    Publication date:

    2002-01-01

    Size:

    9 pages

    ISSN:

    0167-577X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1105 / 530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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