Low-Energy Broad-Beam Sputter Deposition of TiN~x Thin Films: Fid-Bau Portal

Low-Energy Broad-Beam Sputter Deposition of TiN~x Thin Films

Goncic, B. / Popovic, N. / Bogdanov, Z. / Zec, S. / Zlatanovic, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Low-Energy Broad-Beam Sputter Deposition of TiN~x Thin Films

Goncic, B. / Popovic, N. / Bogdanov, Z. / Zec, S. / Zlatanovic, M.

Low-Energy Broad-Beam Sputter Deposition of TiN~x Thin Films

Goncic, B. / Popovic, N. / Bogdanov, Z. / Zec, S. / Zlatanovic, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Low-Energy Broad-Beam Sputter Deposition of TiN~x Thin Films

Contributors:

Goncic, B. (author) / Popovic, N. (author) / Bogdanov, Z. (author) / Zec, S. (author) / Zlatanovic, M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 413 ; 159-164

Publication date:

2003-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Kellett, B. J. / James, J. H. | British Library Online Contents | 1993

Electrical resistivity of RuO~x thin films prepared by ion beam sputter deposition

Kezuka, H. / Egerton, R. / Masui, M. et al. | British Library Online Contents | 1993

Corrosion Resistance of Iron Thin Films Prepared by Ion-Beam-Sputter and Ion-Beam-Assisted Deposition

Kaneko, T. / Akao, N. / Hara, N. et al. | British Library Online Contents | 2000

Corrosion Resistance of Iron Thin Films Prepared by Ion Beam-Sputter and Ion Beam-Assisted Deposition

Kaneko, T. / Akao, N. / Hara, N. et al. | British Library Online Contents | 2000

Reactive sputter deposition and characterization of tantalum nitride thin films

Radhakrishnan, K. / Geok Ing, N. / Gopalakrishnan, R. | British Library Online Contents | 1999