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Electrical resistivity of RuO~x thin films prepared by ion beam sputter deposition
Electrical resistivity of RuO~x thin films prepared by ion beam sputter deposition
Electrical resistivity of RuO~x thin films prepared by ion beam sputter deposition
Kezuka, H. (author) / Egerton, R. (author) / Masui, M. (author) / Wada, T. (author)
APPLIED SURFACE SCIENCE ; 65//66 ; 293
1993-01-01
293 pages
Article (Journal)
Unknown
DDC:
621.35
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