Comparison between Xe+ and O2+ primary ions, at low impact energy, on B delta-doping, SiGe-Si superlattice and Al/Ti multilayer structures: Fid-Bau Portal

Comparison between Xe+ and O2+ primary ions, at low impact energy, on B delta-doping, SiGe-Si superlattice and Al/Ti multilayer structures

Laugier, F. / Holliger, P. / Dupuy, J. C. / Baboux, N.

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Comparison between Xe+ and O2+ primary ions, at low impact energy, on B delta-doping, SiGe-Si superlattice and Al/Ti multilayer structures

Laugier, F. / Holliger, P. / Dupuy, J. C. / Baboux, N.

Comparison between Xe+ and O2+ primary ions, at low impact energy, on B delta-doping, SiGe-Si superlattice and Al/Ti multilayer structures

Laugier, F. / Holliger, P. / Dupuy, J. C. / Baboux, N.

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Check availability in my library

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Document information

Title:

Comparison between Xe+ and O2+ primary ions, at low impact energy, on B delta-doping, SiGe-Si superlattice and Al/Ti multilayer structures

Contributors:

Laugier, F. (author) / Holliger, P. (author) / Dupuy, J. C. (author) / Baboux, N. (author)

Published in:

APPLIED SURFACE SCIENCE ; 203-204 ; 348-353

Publication date:

2003-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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