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Secondary ion mass spectrometry with gas cluster ion beams

Toyoda, N. / Matsuo, J. / Aoki, T. / Yamada, I. / Fenner, D. B.

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Secondary ion mass spectrometry with gas cluster ion beams

Toyoda, N. / Matsuo, J. / Aoki, T. / Yamada, I. / Fenner, D. B.

Secondary ion mass spectrometry with gas cluster ion beams

Toyoda, N. / Matsuo, J. / Aoki, T. / Yamada, I. / Fenner, D. B.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Secondary ion mass spectrometry with gas cluster ion beams

Contributors:

Toyoda, N. (author) / Matsuo, J. (author) / Aoki, T. (author) / Yamada, I. (author) / Fenner, D. B. (author)

Published in:

APPLIED SURFACE SCIENCE ; 203-204 ; 214-218

Publication date:

2003-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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