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Metal implant standards for surface analysis by TOF-SIMS and dynamic SIMS: comparison with TRIM simulation
Metal implant standards for surface analysis by TOF-SIMS and dynamic SIMS: comparison with TRIM simulation
Metal implant standards for surface analysis by TOF-SIMS and dynamic SIMS: comparison with TRIM simulation
Li-Fatou, A. V. (author) / Douglas, M. (author)
APPLIED SURFACE SCIENCE ; 203-204 ; 290-293
2003-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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