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    D-SIMS and ToF-SIMS quantitative depth profiles comparison on ultra thin oxynitrides

    New search for: Bersani, M.
    New search for: Giubertoni, D.
    New search for: Barozzi, M.
    New search for: EIacob, E.
    New search for: Vanzetti, L.
    New search for: Anderle, M.
    New search for: Lazzeri, P.
    New search for: Crivelli, B.
    New search for: Zanderigo, F.

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    D-SIMS and ToF-SIMS quantitative depth profiles comparison on ultra thin oxynitrides

    New search for: Bersani, M.
    New search for: Giubertoni, D.
    New search for: Barozzi, M.
    New search for: EIacob, E.
    New search for: Vanzetti, L.
    New search for: Anderle, M.
    New search for: Lazzeri, P.
    New search for: Crivelli, B.
    New search for: Zanderigo, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    D-SIMS and ToF-SIMS quantitative depth profiles comparison on ultra thin oxynitrides

    New search for: Bersani, M.
    New search for: Giubertoni, D.
    New search for: Barozzi, M.
    New search for: EIacob, E.
    New search for: Vanzetti, L.
    New search for: Anderle, M.
    New search for: Lazzeri, P.
    New search for: Crivelli, B.
    New search for: Zanderigo, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    D-SIMS and ToF-SIMS quantitative depth profiles comparison on ultra thin oxynitrides

    Contributors:

    Bersani, M. (author) / Giubertoni, D. (author) / Barozzi, M. (author) / EIacob, E. (author) / Vanzetti, L. (author) / Anderle, M. (author) / Lazzeri, P. (author) / Crivelli, B. (author) / Zanderigo, F. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 203-204 ; 281-284

    Publication date:

    2003-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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