SIMS backside depth profiling of ultra shallow implants: Fid-Bau Portal

SIMS backside depth profiling of ultra shallow implants

Yeo, K. L. / Wee, A. T. / See, A. / Liu, R. / Ng, C. M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

SIMS backside depth profiling of ultra shallow implants

Yeo, K. L. / Wee, A. T. / See, A. / Liu, R. / Ng, C. M.

SIMS backside depth profiling of ultra shallow implants

Yeo, K. L. / Wee, A. T. / See, A. / Liu, R. / Ng, C. M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

SIMS backside depth profiling of ultra shallow implants

Contributors:

Yeo, K. L. (author) / Wee, A. T. (author) / See, A. (author) / Liu, R. (author) / Ng, C. M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 203-204 ; 335-338

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Hongo, C. / Tomita, M. / Takenaka, M. et al. | British Library Online Contents | 2003

Accurate depth profiling for ultra-shallow implants using backside-SIMS

Hongo, C. / Tomita, M. / Takenaka, M. | British Library Online Contents | 2004

Ultra Shallow Depth Profiling with SIMS

Ehrke, H.-U. | British Library Online Contents | 2008

Toward accurate in-depth profiling of As and P ultra-shallow implants by SIMS

Merkulov, A. / de Chambost, E. / Schuhmacher, M. et al. | British Library Online Contents | 2004

Ultralow-energy SIMS for shallow semiconductor depth profiling

Chanbasha, A. R. / Wee, A. T. | British Library Online Contents | 2008