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Accurate SIMS depth profiling for ultra-shallow implants using backside SIMS

Hongo, C. / Tomita, M. / Takenaka, M. / Murakoshi, A.

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Accurate SIMS depth profiling for ultra-shallow implants using backside SIMS

Hongo, C. / Tomita, M. / Takenaka, M. / Murakoshi, A.

Accurate SIMS depth profiling for ultra-shallow implants using backside SIMS

Hongo, C. / Tomita, M. / Takenaka, M. / Murakoshi, A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Accurate SIMS depth profiling for ultra-shallow implants using backside SIMS

Contributors:

Hongo, C. (author) / Tomita, M. (author) / Takenaka, M. (author) / Murakoshi, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 203-204 ; 264-267

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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