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Toward accurate in-depth profiling of As and P ultra-shallow implants by SIMS

Merkulov, A. / de Chambost, E. / Schuhmacher, M. / Peres, P.

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Toward accurate in-depth profiling of As and P ultra-shallow implants by SIMS

Merkulov, A. / de Chambost, E. / Schuhmacher, M. / Peres, P.

Toward accurate in-depth profiling of As and P ultra-shallow implants by SIMS

Merkulov, A. / de Chambost, E. / Schuhmacher, M. / Peres, P.

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Check availability in my library

Order at Subito €

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Document information

Title:

Toward accurate in-depth profiling of As and P ultra-shallow implants by SIMS

Contributors:

Merkulov, A. (author) / de Chambost, E. (author) / Schuhmacher, M. (author) / Peres, P. (author)

Published in:

APPLIED SURFACE SCIENCE ; 231/232 ; 640-644

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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