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Self formation of Si nanostructured layer at the metal silicide/silicon interface

Belousov, I. V. / Gorchinskiy, A. / Lytvyn, P. / Kuznetsov, G. / Popova, G. / Veblaya, T. / Zherebeskyy, D. / Lysko, O. / Vysokolyan, O. / Buzaneva, E.

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Self formation of Si nanostructured layer at the metal silicide/silicon interface

Belousov, I. V. / Gorchinskiy, A. / Lytvyn, P. / Kuznetsov, G. / Popova, G. / Veblaya, T. / Zherebeskyy, D. / Lysko, O. / Vysokolyan, O. / Buzaneva, E.

Self formation of Si nanostructured layer at the metal silicide/silicon interface

Belousov, I. V. / Gorchinskiy, A. / Lytvyn, P. / Kuznetsov, G. / Popova, G. / Veblaya, T. / Zherebeskyy, D. / Lysko, O. / Vysokolyan, O. / Buzaneva, E.

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Document information

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Document information

Title:

Self formation of Si nanostructured layer at the metal silicide/silicon interface

Contributors:

Belousov, I. V. (author) / Gorchinskiy, A. (author) / Lytvyn, P. (author) / Kuznetsov, G. (author) / Popova, G. (author) / Veblaya, T. (author) / Zherebeskyy, D. (author) / Lysko, O. (author) / Vysokolyan, O. (author) / Buzaneva, E. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -AMSTERDAM THEN LAUSANNE- C ; 23 ; 181-186

Publication date:

2003-01-01

Size:

6 pages

ISSN:

0928-4931

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 660

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