Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Chemical bonding of magnetron-sputtered copper on PECVD amorphous SiCOF film

    New search for: Ding, S. J.
    New search for: Zhang, D. W.
    New search for: Wang, J. T.
    New search for: Lee, W. W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Chemical bonding of magnetron-sputtered copper on PECVD amorphous SiCOF film

    New search for: Ding, S. J.
    New search for: Zhang, D. W.
    New search for: Wang, J. T.
    New search for: Lee, W. W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Chemical bonding of magnetron-sputtered copper on PECVD amorphous SiCOF film

    New search for: Ding, S. J.
    New search for: Zhang, D. W.
    New search for: Wang, J. T.
    New search for: Lee, W. W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Chemical bonding of magnetron-sputtered copper on PECVD amorphous SiCOF film

    Contributors:

    Ding, S. J. (author) / Zhang, D. W. (author) / Wang, J. T. (author) / Lee, W. W. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 206 ; 321-330

    Publication date:

    2003-01-01

    Size:

    10 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Nanohardness vs. Friction Behavior in Magnetron Sputtered and PECVD W-C Coatings

    Lofaj, F. / Ferdinandy, M. / Hornak, P. | British Library Online Contents | 2014

    Thermal stability of magnetron sputtered amorphous Si2C

    Gustus, R. / Gruber, W. / Wegewitz, L. et al. | British Library Online Contents | 2012

    Magnetron sputtered NbN thin film electrodes for supercapacitors

    Shen, Hao / Wei, Binbin / Zhang, Dongfang et al. | British Library Online Contents | 2018

    RF magnetron sputtered TiNiCu shape memory alloy thin film

    Fu, Y. / Du, H. | British Library Online Contents | 2003

    Studies on nickel electrodeposits on dc magnetron sputtered copper substrates

    Subramanian, B. / Jayakumar, S. / Jayachandran, M. et al. | British Library Online Contents | 2005

    Back to top