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    Reduced bias synthesis of cubic boron nitride thin films by magnetically enhanced inductively coupled radio frequency plasma chemical vapor deposition

    New search for: Chattopadhyay, K. K.
    New search for: Banerjee, A. N.
    New search for: Kundoo, S.

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    Reduced bias synthesis of cubic boron nitride thin films by magnetically enhanced inductively coupled radio frequency plasma chemical vapor deposition

    New search for: Chattopadhyay, K. K.
    New search for: Banerjee, A. N.
    New search for: Kundoo, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Reduced bias synthesis of cubic boron nitride thin films by magnetically enhanced inductively coupled radio frequency plasma chemical vapor deposition

    New search for: Chattopadhyay, K. K.
    New search for: Banerjee, A. N.
    New search for: Kundoo, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
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    Document information
    Title:

    Reduced bias synthesis of cubic boron nitride thin films by magnetically enhanced inductively coupled radio frequency plasma chemical vapor deposition

    Contributors:

    Chattopadhyay, K. K. (author) / Banerjee, A. N. (author) / Kundoo, S. (author)

    Published in:

    MATERIALS LETTERS ; 57 ; 1459-1463

    Publication date:

    2003-01-01

    Size:

    5 pages

    ISSN:

    0167-577X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1105 / 530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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