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Reduced bias synthesis of cubic boron nitride thin films by magnetically enhanced inductively coupled radio frequency plasma chemical vapor deposition
Reduced bias synthesis of cubic boron nitride thin films by magnetically enhanced inductively coupled radio frequency plasma chemical vapor deposition
Reduced bias synthesis of cubic boron nitride thin films by magnetically enhanced inductively coupled radio frequency plasma chemical vapor deposition
Chattopadhyay, K. K. (Autor:in) / Banerjee, A. N. (Autor:in) / Kundoo, S. (Autor:in)
MATERIALS LETTERS ; 57 ; 1459-1463
01.01.2003
5 pages
Aufsatz (Zeitschrift)
Englisch
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