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    Influence of deposition parameters on the stress of magnetron sputter-deposited AIN thin films on Si(100) substrates

    New search for: Iriarte, G. F.
    New search for: Engelmark, F.
    New search for: Ottosson, M.
    New search for: Katardjiev, I. V.

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    Influence of deposition parameters on the stress of magnetron sputter-deposited AIN thin films on Si(100) substrates

    New search for: Iriarte, G. F.
    New search for: Engelmark, F.
    New search for: Ottosson, M.
    New search for: Katardjiev, I. V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Influence of deposition parameters on the stress of magnetron sputter-deposited AIN thin films on Si(100) substrates

    New search for: Iriarte, G. F.
    New search for: Engelmark, F.
    New search for: Ottosson, M.
    New search for: Katardjiev, I. V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
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    Document information
    Title:

    Influence of deposition parameters on the stress of magnetron sputter-deposited AIN thin films on Si(100) substrates

    Contributors:

    Iriarte, G. F. (author) / Engelmark, F. (author) / Ottosson, M. (author) / Katardjiev, I. V. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 18 ; 423-432

    Publication date:

    2003-01-01

    Size:

    10 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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