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Diagnostic studies of discharges used for plasma assisted physical vapour deposition
Diagnostic studies of discharges used for plasma assisted physical vapour deposition
Diagnostic studies of discharges used for plasma assisted physical vapour deposition
Davison, A. (author) / Avelar-Batista, J. C. (author) / Wilson, A. D. (author) / Leyland, A. (author) / Matthews, A. (author) / Fancey, K. S. (author)
SURFACE ENGINEERING -LONDON- ; 18 ; 385-390
2002-01-01
6 pages
Article (Journal)
English
DDC:
620.44
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