The influence of neon in the deposition of titanium nitride by plasma-assisted physical vapour deposition: Fid-Bau Portal

The influence of neon in the deposition of titanium nitride by plasma-assisted physical vapour deposition

Fancey, K. S. / Leyland, A. / Moh'd Badow, F. / Matthews, A.

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The influence of neon in the deposition of titanium nitride by plasma-assisted physical vapour deposition

Fancey, K. S. / Leyland, A. / Moh'd Badow, F. / Matthews, A.

The influence of neon in the deposition of titanium nitride by plasma-assisted physical vapour deposition

Fancey, K. S. / Leyland, A. / Moh'd Badow, F. / Matthews, A.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

The influence of neon in the deposition of titanium nitride by plasma-assisted physical vapour deposition

Contributors:

Fancey, K. S. (author) / Leyland, A. (author) / Moh'd Badow, F. (author) / Matthews, A. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 262 ; 227-231

Publication date:

1999-01-01

Size:

5 pages

ISSN:

0921-5093

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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