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Precursor mutual interactions in the kinetics of MOCVD of SBT films

Condorelli, G. G. / Baeri, A. / Anastasi, G. / Fragala, I. L.

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Precursor mutual interactions in the kinetics of MOCVD of SBT films

Condorelli, G. G. / Baeri, A. / Anastasi, G. / Fragala, I. L.

Precursor mutual interactions in the kinetics of MOCVD of SBT films

Condorelli, G. G. / Baeri, A. / Anastasi, G. / Fragala, I. L.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Precursor mutual interactions in the kinetics of MOCVD of SBT films

Contributors:

Condorelli, G. G. (author) / Baeri, A. (author) / Anastasi, G. (author) / Fragala, I. L. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 167-171

Publication date:

2002-01-01

Size:

5 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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