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    Synthesis and characterization of hafnium tert-butylacetoacetate as new MOCVD precursor for HfO2 films

    New search for: Pasko, S.
    New search for: Abrutis, A.

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    Synthesis and characterization of hafnium tert-butylacetoacetate as new MOCVD precursor for HfO2 films

    New search for: Pasko, S.
    New search for: Abrutis, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Synthesis and characterization of hafnium tert-butylacetoacetate as new MOCVD precursor for HfO2 films

    New search for: Pasko, S.
    New search for: Abrutis, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
    Title:

    Synthesis and characterization of hafnium tert-butylacetoacetate as new MOCVD precursor for HfO2 films

    Contributors:

    Pasko, S. (author) / Hubert-Pfalzgraf, L. G. (author) / Abrutis, A. (author)

    Published in:

    MATERIALS LETTERS ; 59 ; 1836-1840

    Publication date:

    2005-01-01

    Size:

    5 pages

    ISSN:

    0167-577X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1105 / 530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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