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Ferroelectric thin and thick films for microsystems

Whatmore, R. W. / Zhang, Q. / Huang, Z. / Dorey, R. A.

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Ferroelectric thin and thick films for microsystems

Whatmore, R. W. / Zhang, Q. / Huang, Z. / Dorey, R. A.

Ferroelectric thin and thick films for microsystems

Whatmore, R. W. / Zhang, Q. / Huang, Z. / Dorey, R. A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

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Document information

Title:

Ferroelectric thin and thick films for microsystems

Contributors:

Whatmore, R. W. (author) / Zhang, Q. (author) / Huang, Z. (author) / Dorey, R. A. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 65-76

Publication date:

2002-01-01

Size:

12 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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