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Effects of ZnO buffer layer thickness on properties of ZnO thin films deposited by radio-frequency magnetron sputtering

Bang, K. H. / Hwang, D. K. / Myoung, J. M.

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Effects of ZnO buffer layer thickness on properties of ZnO thin films deposited by radio-frequency magnetron sputtering

Bang, K. H. / Hwang, D. K. / Myoung, J. M.

Effects of ZnO buffer layer thickness on properties of ZnO thin films deposited by radio-frequency magnetron sputtering

Bang, K. H. / Hwang, D. K. / Myoung, J. M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Effects of ZnO buffer layer thickness on properties of ZnO thin films deposited by radio-frequency magnetron sputtering

Contributors:

Bang, K. H. (author) / Hwang, D. K. (author) / Myoung, J. M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 207 ; 359-364

Publication date:

2003-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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