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Zn channeled implantation in GaN: damages investigated by using high resolution XTEM and channeling RBS
Zn channeled implantation in GaN: damages investigated by using high resolution XTEM and channeling RBS
Zn channeled implantation in GaN: damages investigated by using high resolution XTEM and channeling RBS
Ding, F. R. (author) / He, W. (author) / Vantomme, A. (author) / Zhao, Q. (author) / Pipeleers, B. (author) / Jacobs, K. (author) / Moerman, I. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 98 ; 70-73
2003-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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