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Statistical analysis of shallow p-n junction leakage increase using XTEM results probabilities

Czerwinski, A. / Katcki, J. / Poyai, A. / Simoen, E. / Claeys, C. / Ratajczak, J. / Gaubas, E.

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Statistical analysis of shallow p-n junction leakage increase using XTEM results probabilities

Czerwinski, A. / Katcki, J. / Poyai, A. / Simoen, E. / Claeys, C. / Ratajczak, J. / Gaubas, E.

Statistical analysis of shallow p-n junction leakage increase using XTEM results probabilities

Czerwinski, A. / Katcki, J. / Poyai, A. / Simoen, E. / Claeys, C. / Ratajczak, J. / Gaubas, E.

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Check availability in my library

Order at Subito €

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Document information

Title:

Statistical analysis of shallow p-n junction leakage increase using XTEM results probabilities

Contributors:

Czerwinski, A. (author) / Katcki, J. (author) / Poyai, A. (author) / Simoen, E. (author) / Claeys, C. (author) / Ratajczak, J. (author) / Gaubas, E. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 105-107

Publication date:

2001-01-01

Size:

3 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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