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    A mathematical model for chemical-mechanical polishing based on formation and removal of weakly bonded molecular species

    New search for: Zhao, Y.
    New search for: Chang, L.
    New search for: Kim, S. H.

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    A mathematical model for chemical-mechanical polishing based on formation and removal of weakly bonded molecular species

    New search for: Zhao, Y.
    New search for: Chang, L.
    New search for: Kim, S. H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    A mathematical model for chemical-mechanical polishing based on formation and removal of weakly bonded molecular species

    New search for: Zhao, Y.
    New search for: Chang, L.
    New search for: Kim, S. H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    A mathematical model for chemical-mechanical polishing based on formation and removal of weakly bonded molecular species

    Contributors:

    Zhao, Y. (author) / Chang, L. (author) / Kim, S. H. (author)

    Published in:

    WEAR -LAUSANNE- ; 254 ; 332-339

    Publication date:

    2003-01-01

    Size:

    8 pages

    ISSN:

    0043-1648

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11292

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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