Pulsed excimer laser ablation deposition of YSZ and TiN/YSZ thin films on Si substrates: Fid-Bau Portal

Pulsed excimer laser ablation deposition of YSZ and TiN/YSZ thin films on Si substrates

Caricato, A. P. / Di Cristoforo, A. / Fernandez, M. / Leggieri, G. / Luches, A. / Majni, G. / Martino, M. / Mengucci, P.

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Pulsed excimer laser ablation deposition of YSZ and TiN/YSZ thin films on Si substrates

Caricato, A. P. / Di Cristoforo, A. / Fernandez, M. / Leggieri, G. / Luches, A. / Majni, G. / Martino, M. / Mengucci, P.

Pulsed excimer laser ablation deposition of YSZ and TiN/YSZ thin films on Si substrates

Caricato, A. P. / Di Cristoforo, A. / Fernandez, M. / Leggieri, G. / Luches, A. / Majni, G. / Martino, M. / Mengucci, P.

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Document information

Title:

Pulsed excimer laser ablation deposition of YSZ and TiN/YSZ thin films on Si substrates

Contributors:

Caricato, A. P. (author) / Di Cristoforo, A. (author) / Fernandez, M. (author) / Leggieri, G. (author) / Luches, A. (author) / Majni, G. (author) / Martino, M. (author) / Mengucci, P. (author)

Published in:

APPLIED SURFACE SCIENCE ; 208/209 ; 615-619

Publication date:

2003-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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