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Pulsed excimer laser ablation deposition of YSZ and TiN/YSZ thin films on Si substrates
Pulsed excimer laser ablation deposition of YSZ and TiN/YSZ thin films on Si substrates
Pulsed excimer laser ablation deposition of YSZ and TiN/YSZ thin films on Si substrates
Caricato, A. P. (Autor:in) / Di Cristoforo, A. (Autor:in) / Fernandez, M. (Autor:in) / Leggieri, G. (Autor:in) / Luches, A. (Autor:in) / Majni, G. (Autor:in) / Martino, M. (Autor:in) / Mengucci, P. (Autor:in)
APPLIED SURFACE SCIENCE ; 208/209 ; 615-619
01.01.2003
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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