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X-ray diffraction and electrical characterization of photo-CVD zirconium oxide layers

Yu, J. J. / Boyd, I. W.

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X-ray diffraction and electrical characterization of photo-CVD zirconium oxide layers

Yu, J. J. / Boyd, I. W.

X-ray diffraction and electrical characterization of photo-CVD zirconium oxide layers

Yu, J. J. / Boyd, I. W.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

X-ray diffraction and electrical characterization of photo-CVD zirconium oxide layers

Contributors:

Yu, J. J. (author) / Boyd, I. W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 208/209 ; 374-377

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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