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Formation of stable zirconium oxide on silicon by photo-assisted sol-gel processing

Yu, J. J. / Zhang, J. Y. / Boyd, I. W.

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Formation of stable zirconium oxide on silicon by photo-assisted sol-gel processing

Yu, J. J. / Zhang, J. Y. / Boyd, I. W.

Formation of stable zirconium oxide on silicon by photo-assisted sol-gel processing

Yu, J. J. / Zhang, J. Y. / Boyd, I. W.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Formation of stable zirconium oxide on silicon by photo-assisted sol-gel processing

Contributors:

Yu, J. J. (author) / Zhang, J. Y. (author) / Boyd, I. W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 186 ; 190-194

Publication date:

2002-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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