Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Influence of laser fluence in ArF-excimer laser assisted crystallisation of a-SiGe:H films

    New search for: Chiussi, S.
    New search for: Lopez, E.
    New search for: Serra, J.
    New search for: Gonzalez, P.
    New search for: Serra, C.
    New search for: Leon, B.
    New search for: Fabbri, F.
    New search for: Fornarini, L.
    New search for: Martelli, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Influence of laser fluence in ArF-excimer laser assisted crystallisation of a-SiGe:H films

    New search for: Chiussi, S.
    New search for: Lopez, E.
    New search for: Serra, J.
    New search for: Gonzalez, P.
    New search for: Serra, C.
    New search for: Leon, B.
    New search for: Fabbri, F.
    New search for: Fornarini, L.
    New search for: Martelli, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Influence of laser fluence in ArF-excimer laser assisted crystallisation of a-SiGe:H films

    New search for: Chiussi, S.
    New search for: Lopez, E.
    New search for: Serra, J.
    New search for: Gonzalez, P.
    New search for: Serra, C.
    New search for: Leon, B.
    New search for: Fabbri, F.
    New search for: Fornarini, L.
    New search for: Martelli, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Influence of laser fluence in ArF-excimer laser assisted crystallisation of a-SiGe:H films

    Contributors:

    Chiussi, S. (author) / Lopez, E. (author) / Serra, J. (author) / Gonzalez, P. (author) / Serra, C. (author) / Leon, B. (author) / Fabbri, F. (author) / Fornarini, L. (author) / Martelli, S. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 208/209 ; 358-363

    Publication date:

    2003-01-01

    Size:

    6 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Crystallisation of TiO2 thin films induced by excimer laser irradiation

    Van Overschelde, O. / Snyders, R. / Wautelet, M. | British Library Online Contents | 2007

    Carbon nitride films deposited by very high-fluence XeCl excimer-laser reactive ablation

    Acquaviva, S. / D'Anna, E. / De Giorgi, M. L. et al. | British Library Online Contents | 2000

    Low-fluence excimer laser irradiation-induced defect formation in indium-tin oxide films

    Szoerenyi, T. / Laude, L. D. / Bertoti, I. et al. | British Library Online Contents | 1996

    Effects of cobalt thin films on the a-Si crystallisation induced by excimer laser irradiation

    Mengucci, P. / Barucca, G. / D'Anna, E. et al. | British Library Online Contents | 1999

    Excimer laser interaction with dielectric thin films

    Welsch, E. / Ettrich, K. / Blaschke, H. et al. | British Library Online Contents | 1996

    Back to top