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    The Effects of Annealing on Nano-Silicon Carbide Films Grown by Magnetron Sputtering Method

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    New search for: Huizhao, Z.
    New search for: Yingge, Y.

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    The Effects of Annealing on Nano-Silicon Carbide Films Grown by Magnetron Sputtering Method

    New search for: Xia, A.
    New search for: Huizhao, Z.
    New search for: Yingge, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    The Effects of Annealing on Nano-Silicon Carbide Films Grown by Magnetron Sputtering Method

    New search for: Xia, A.
    New search for: Huizhao, Z.
    New search for: Yingge, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    The Effects of Annealing on Nano-Silicon Carbide Films Grown by Magnetron Sputtering Method

    Contributors:

    Xia, A. (author) / Huizhao, Z. (author) / Yingge, Y. (author)

    Published in:

    RARE METAL MATERIALS AND ENGINEERING ; 30 ; 556-559

    Publication date:

    2001-01-01

    Size:

    4 pages

    ISSN:

    1002-185X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  669

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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