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    Optical and Tribological Properties of Silicon Carbide Thin Films Grown by Reactive DC Magnetron Sputtering

    New search for: Tavsanoglu, T.
    New search for: Baskurt, E.
    New search for: Yucel, O.
    New search for: Goto, T.
    New search for: Cheng, Y.-B.
    New search for: Akatsu, T.

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    Optical and Tribological Properties of Silicon Carbide Thin Films Grown by Reactive DC Magnetron Sputtering

    New search for: Tavsanoglu, T.
    New search for: Baskurt, E.
    New search for: Yucel, O.
    New search for: Goto, T.
    New search for: Cheng, Y.-B.
    New search for: Akatsu, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Optical and Tribological Properties of Silicon Carbide Thin Films Grown by Reactive DC Magnetron Sputtering

    New search for: Tavsanoglu, T.
    New search for: Baskurt, E.
    New search for: Yucel, O.
    New search for: Goto, T.
    New search for: Cheng, Y.-B.
    New search for: Akatsu, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Optical and Tribological Properties of Silicon Carbide Thin Films Grown by Reactive DC Magnetron Sputtering

    Contributors:

    Tavsanoglu, T. (author) / Baskurt, E. (author) / Yucel, O. (author) / Goto, T. / Cheng, Y.-B. / Akatsu, T.

    Published in:

    Advanced Engineering Ceramics and Composites CSJ Series - Publications of the Ceramic Society of Japan Vol. 22 Key Engineering Materials Vol. 484 ISSN 1013-9826 Selected, peer reviewed papers from the 4^t^h International Symposium on Advanced Ceramics, Osaka International Convention Center, November 14-18, 2010, Japan ; 145-151

    KEY ENGINEERING MATERIALS ; 484

    Publication date:

    2011-01-01

    Size:

    7 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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