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Device-quality GaN-dielectric interfaces by 300degreeC remote plasma processing
Device-quality GaN-dielectric interfaces by 300degreeC remote plasma processing
Device-quality GaN-dielectric interfaces by 300degreeC remote plasma processing
Bae, C. (author) / Rayner, G. B. (author) / Lucovsky, G. (author)
APPLIED SURFACE SCIENCE ; 216 ; 119-123
2003-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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