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Fabrication of Large-Area Periodic Nanopillar Arrays for Nanoimprint Lithography Using Polymer Colloid Masks
Fabrication of Large-Area Periodic Nanopillar Arrays for Nanoimprint Lithography Using Polymer Colloid Masks
Fabrication of Large-Area Periodic Nanopillar Arrays for Nanoimprint Lithography Using Polymer Colloid Masks
Kuo, C.-W. (author) / Shiu, J.-Y. (author) / Cho, Y.-H. (author) / Chen, P. (author)
ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 15 ; 1065-1068
2003-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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