Fabrication of large-scale periodic silicon nanopillar arrays for 2D nanomold using modified nanosphere lithography: Fid-Bau Portal

Fabrication of large-scale periodic silicon nanopillar arrays for 2D nanomold using modified nanosphere lithography

Li, W. / Xu, L. / Zhao, W. M. / Sun, P. / Huang, X. F. / Chen, K. J.

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Fabrication of large-scale periodic silicon nanopillar arrays for 2D nanomold using modified nanosphere lithography

Li, W. / Xu, L. / Zhao, W. M. / Sun, P. / Huang, X. F. / Chen, K. J.

Fabrication of large-scale periodic silicon nanopillar arrays for 2D nanomold using modified nanosphere lithography

Li, W. / Xu, L. / Zhao, W. M. / Sun, P. / Huang, X. F. / Chen, K. J.

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Access via TIB

Check availability in my library

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Document information

Title:

Fabrication of large-scale periodic silicon nanopillar arrays for 2D nanomold using modified nanosphere lithography

Contributors:

Li, W. (author) / Xu, L. (author) / Zhao, W. M. (author) / Sun, P. (author) / Huang, X. F. (author) / Chen, K. J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 9035-9038

Publication date:

2007-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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