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    Tracing the Ti-silicide formation by in situ ellipsometric measurements

    New search for: Stark, T.
    New search for: Hergert, F.
    New search for: Ley, L.

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    Tracing the Ti-silicide formation by in situ ellipsometric measurements

    New search for: Stark, T.
    New search for: Hergert, F.
    New search for: Ley, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Tracing the Ti-silicide formation by in situ ellipsometric measurements

    New search for: Stark, T.
    New search for: Hergert, F.
    New search for: Ley, L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Tracing the Ti-silicide formation by in situ ellipsometric measurements

    Contributors:

    Stark, T. (author) / Hergert, F. (author) / Ley, L. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 6 ; 77-83

    Publication date:

    2003-01-01

    Size:

    7 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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