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Evaluation strategies for multi-layer, multi-material ellipsometric measurements

Polgar, O. / Petrik, P. / Lohner, T. / Fried, M.

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Evaluation strategies for multi-layer, multi-material ellipsometric measurements

Polgar, O. / Petrik, P. / Lohner, T. / Fried, M.

Evaluation strategies for multi-layer, multi-material ellipsometric measurements

Polgar, O. / Petrik, P. / Lohner, T. / Fried, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Evaluation strategies for multi-layer, multi-material ellipsometric measurements

Contributors:

Polgar, O. (author) / Petrik, P. (author) / Lohner, T. (author) / Fried, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 57-64

Publication date:

2006-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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