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Computational Modeling for the Development of CVD SiC Epitaxial Growth Processes
Computational Modeling for the Development of CVD SiC Epitaxial Growth Processes
Computational Modeling for the Development of CVD SiC Epitaxial Growth Processes
Melnychuk, G. (author) / Koshka, Y. (author) / Yingquan, S. (author) / Mazzola, M. (author) / Pittman, C. U. (author) / Bergman, P. / Janzen, E.
2003-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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