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Electrical Characterization of Erbium-Implanted 4H-SiC Epilayers

Reshanov, S. A. / Klettke, O. / Pensl, G. / Choyke, W. J.

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Electrical Characterization of Erbium-Implanted 4H-SiC Epilayers

Reshanov, S. A. / Klettke, O. / Pensl, G. / Choyke, W. J.

Electrical Characterization of Erbium-Implanted 4H-SiC Epilayers

Reshanov, S. A. / Klettke, O. / Pensl, G. / Choyke, W. J.

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Check availability in my library

Order at Subito €

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Document information

Title:

Electrical Characterization of Erbium-Implanted 4H-SiC Epilayers

Contributors:

Reshanov, S. A. (author) / Klettke, O. (author) / Pensl, G. (author) / Choyke, W. J. (author) / Bergman, P. / Janzen, E.

Published in:

Silicon Carbide and Related Materials 2002 ; 459-462

MATERIALS SCIENCE FORUM ; 433/436

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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