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Electrical Characterization of Erbium-Implanted 4H-SiC Epilayers
Electrical Characterization of Erbium-Implanted 4H-SiC Epilayers
Electrical Characterization of Erbium-Implanted 4H-SiC Epilayers
Reshanov, S. A. (author) / Klettke, O. (author) / Pensl, G. (author) / Choyke, W. J. (author) / Bergman, P. / Janzen, E.
2003-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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