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Growth of ZnO thin film on SiO2 substrates by the RF magnetron sputtering method

Kim, K. S. / Kim, H. W. / Kim, N. H.

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Growth of ZnO thin film on SiO2 substrates by the RF magnetron sputtering method

Kim, K. S. / Kim, H. W. / Kim, N. H.

Growth of ZnO thin film on SiO2 substrates by the RF magnetron sputtering method

Kim, K. S. / Kim, H. W. / Kim, N. H.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Growth of ZnO thin film on SiO2 substrates by the RF magnetron sputtering method

Contributors:

Kim, K. S. (author) / Kim, H. W. (author) / Kim, N. H. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE LETTERS ; 22 ; 1155-1156

Publication date:

2003-01-01

Size:

2 pages

ISSN:

0261-8028

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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