Influence of the Plasma Condition on the Morphology of Vertically Aligned Carbon Nanotube Films Grown by RF Plasma Chemical Vapor Deposition: Fid-Bau Portal

Influence of the Plasma Condition on the Morphology of Vertically Aligned Carbon Nanotube Films Grown by RF Plasma Chemical Vapor Deposition

Ikuno, T. / Takahashi, S. / Kamada, K. / Ohkura, S. / Honda, S.-I. / Katayama, M. / Hirao, T. / Oura, K.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Influence of the Plasma Condition on the Morphology of Vertically Aligned Carbon Nanotube Films Grown by RF Plasma Chemical Vapor Deposition

Ikuno, T. / Takahashi, S. / Kamada, K. / Ohkura, S. / Honda, S.-I. / Katayama, M. / Hirao, T. / Oura, K.

Influence of the Plasma Condition on the Morphology of Vertically Aligned Carbon Nanotube Films Grown by RF Plasma Chemical Vapor Deposition

Ikuno, T. / Takahashi, S. / Kamada, K. / Ohkura, S. / Honda, S.-I. / Katayama, M. / Hirao, T. / Oura, K.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Influence of the Plasma Condition on the Morphology of Vertically Aligned Carbon Nanotube Films Grown by RF Plasma Chemical Vapor Deposition

Contributors:

Ikuno, T. (author) / Takahashi, S. (author) / Kamada, K. (author) / Ohkura, S. (author) / Honda, S.-I. (author) / Katayama, M. (author) / Hirao, T. (author) / Oura, K. (author)

Published in:

SURFACE REVIEW AND LETTERS ; 10 ; 611-616

Publication date:

2003-01-01

Size:

6 pages

ISSN:

0218-625X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 530.417

Sohn, J. I. / Nam, C. / Lee, S. | British Library Online Contents | 2002

Aligned carbon nanotubes grown on the inner surface of iron ring through microwave plasma chemical vapor deposition

Wang, S. G. / Wang, J. H. / Zhang, B. H. et al. | British Library Online Contents | 2003

Carbon Nanowalls Grown by Microwave Plasma Enhanced Chemical Vapor Deposition

Wu, Y. / Qiao, P. / Chong, T. et al. | British Library Online Contents | 2002

Controlled synthesis of aligned carbon nanotube arrays on catalyst patterned silicon substrates by plasma-enhanced chemical vapor deposition

Wang, H. / Lin, J. / Huan, C. H. et al. | British Library Online Contents | 2001

Plasma effects in aligned carbon nanoflake growth by plasma-enhanced hot filament chemical vapor deposition

Wang, B. B. / Zheng, K. / Cheng, Q. J. et al. | British Library Online Contents | 2015