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Study of range distribution parameters for fluorine ions implantation in AgGaS2 crystal

Liu, X. / Li, F. / Lu, Q. / Xia, Y. / Zhang, C.

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Study of range distribution parameters for fluorine ions implantation in AgGaS2 crystal

Liu, X. / Li, F. / Lu, Q. / Xia, Y. / Zhang, C.

Study of range distribution parameters for fluorine ions implantation in AgGaS2 crystal

Liu, X. / Li, F. / Lu, Q. / Xia, Y. / Zhang, C.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

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Document information

Title:

Study of range distribution parameters for fluorine ions implantation in AgGaS2 crystal

Contributors:

Liu, X. (author) / Li, F. (author) / Lu, Q. (author) / Xia, Y. (author) / Zhang, C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 218 ; 138-143

Publication date:

2003-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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