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    Gas cluster ion beam processing of gallium antimonide wafers for surface and sub-surface damage reduction

    New search for: Li, X.
    New search for: Goodhue, W. D.
    New search for: Santeufeimio, C.
    New search for: Tetreault, T. G.
    New search for: MacCrimmon, R.
    New search for: Allen, L. P.
    New search for: Bliss, D.
    New search for: Krishnaswami, K.
    New search for: Sung, C.

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    Gas cluster ion beam processing of gallium antimonide wafers for surface and sub-surface damage reduction

    New search for: Li, X.
    New search for: Goodhue, W. D.
    New search for: Santeufeimio, C.
    New search for: Tetreault, T. G.
    New search for: MacCrimmon, R.
    New search for: Allen, L. P.
    New search for: Bliss, D.
    New search for: Krishnaswami, K.
    New search for: Sung, C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Gas cluster ion beam processing of gallium antimonide wafers for surface and sub-surface damage reduction

    New search for: Li, X.
    New search for: Goodhue, W. D.
    New search for: Santeufeimio, C.
    New search for: Tetreault, T. G.
    New search for: MacCrimmon, R.
    New search for: Allen, L. P.
    New search for: Bliss, D.
    New search for: Krishnaswami, K.
    New search for: Sung, C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Gas cluster ion beam processing of gallium antimonide wafers for surface and sub-surface damage reduction

    Contributors:

    Li, X. (author) / Goodhue, W. D. (author) / Santeufeimio, C. (author) / Tetreault, T. G. (author) / MacCrimmon, R. (author) / Allen, L. P. (author) / Bliss, D. (author) / Krishnaswami, K. (author) / Sung, C. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 218 ; 251-258

    Publication date:

    2003-01-01

    Size:

    8 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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