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    Precision Thickness Measurement of Ultra-Thin Films via XPS

    New search for: Geng, S.
    New search for: Zhang, S.
    New search for: Onishi, H.

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    Precision Thickness Measurement of Ultra-Thin Films via XPS

    New search for: Geng, S.
    New search for: Zhang, S.
    New search for: Onishi, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Precision Thickness Measurement of Ultra-Thin Films via XPS

    New search for: Geng, S.
    New search for: Zhang, S.
    New search for: Onishi, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Precision Thickness Measurement of Ultra-Thin Films via XPS

    Contributors:

    Geng, S. (author) / Zhang, S. (author) / Onishi, H. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 437/438 ; 195-198

    Publication date:

    2003-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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