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Crystallographic defects under device-killing surface faults in a homoepitaxially grown film of SiC
Crystallographic defects under device-killing surface faults in a homoepitaxially grown film of SiC
Crystallographic defects under device-killing surface faults in a homoepitaxially grown film of SiC
Okada, T. (author) / Kimoto, T. (author) / Yamai, K. (author) / Matsunami, H. (author) / Inoko, F. (author)
MATERIALS SCIENCE AND ENGINEERING A ; 361 ; 67-74
2003-01-01
8 pages
Article (Journal)
English
DDC:
620.11
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