Structures of Comets in a Homoepitaxially Grown 4H-SiC Film Studied by DUV Micro-Raman Spectroscopy: Fid-Bau Portal

Structures of Comets in a Homoepitaxially Grown 4H-SiC Film Studied by DUV Micro-Raman Spectroscopy

Tomita, T. / Matsuo, S. / Okada, T. / Kimoto, T. / Mitani, T. / Nakashima, S.

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Structures of Comets in a Homoepitaxially Grown 4H-SiC Film Studied by DUV Micro-Raman Spectroscopy

Tomita, T. / Matsuo, S. / Okada, T. / Kimoto, T. / Mitani, T. / Nakashima, S.

Structures of Comets in a Homoepitaxially Grown 4H-SiC Film Studied by DUV Micro-Raman Spectroscopy

Tomita, T. / Matsuo, S. / Okada, T. / Kimoto, T. / Mitani, T. / Nakashima, S.

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Title:

Structures of Comets in a Homoepitaxially Grown 4H-SiC Film Studied by DUV Micro-Raman Spectroscopy

Contributors:

Tomita, T. (author) / Matsuo, S. (author) / Okada, T. (author) / Kimoto, T. (author) / Mitani, T. (author) / Nakashima, S. (author) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.

Published in:

Silicon Carbide and Related Materials - 2005 ; 339-342

MATERIALS SCIENCE FORUM ; 527/529

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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