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Properties of fluorinated amorphous diamond like carbon films by PECVD

Yu, G. Q. / Tay, B. K. / Sun, Z. / Pan, L. K.

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Properties of fluorinated amorphous diamond like carbon films by PECVD

Yu, G. Q. / Tay, B. K. / Sun, Z. / Pan, L. K.

Properties of fluorinated amorphous diamond like carbon films by PECVD

Yu, G. Q. / Tay, B. K. / Sun, Z. / Pan, L. K.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Properties of fluorinated amorphous diamond like carbon films by PECVD

Contributors:

Yu, G. Q. (author) / Tay, B. K. (author) / Sun, Z. (author) / Pan, L. K. (author)

Published in:

APPLIED SURFACE SCIENCE ; 219 ; 228-237

Publication date:

2003-01-01

Size:

10 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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