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Structural characteristics of diamond-like nanocomposite films grown by PECVD
Structural characteristics of diamond-like nanocomposite films grown by PECVD
Structural characteristics of diamond-like nanocomposite films grown by PECVD
Yang, W. J. (author) / Choa, Y. H. (author) / Sekino, T. (author) / Shim, K. B. (author) / Niihara, K. (author) / Auh, K. H. (author)
MATERIALS LETTERS ; 57 ; 3305-3310
2003-01-01
6 pages
Article (Journal)
English
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