Microstructure of ZnO/Cu/TaN/SiO2/Si multilayers prepared by sputter deposition: Fid-Bau Portal

Microstructure of ZnO/Cu/TaN/SiO2/Si multilayers prepared by sputter deposition

Wu, W. Y. / Ting, J. M.

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Microstructure of ZnO/Cu/TaN/SiO2/Si multilayers prepared by sputter deposition

Wu, W. Y. / Ting, J. M.

Microstructure of ZnO/Cu/TaN/SiO2/Si multilayers prepared by sputter deposition

Wu, W. Y. / Ting, J. M.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Microstructure of ZnO/Cu/TaN/SiO2/Si multilayers prepared by sputter deposition

Contributors:

Wu, W. Y. (author) / Ting, J. M. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE LETTERS ; 22 ; 1603-1606

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0261-8028

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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